真空角式挡板阀

Vacuum Angle Flapper ValveAngle valves are a device that manually or pneumatic rotates the thread to drive the valve shaft up and down, causing the valve seat to open or close, thereby connecting or cutting off the airflow in the vacuum system.
Valve body designed in 90° right angle(L type) and 45° right angle(Y type). Connecting Flanges are available in KF, ISO, CF types and Tube ends as well. -6 5 -7 They are rated for high-vacuum use and pressure rate from 1X10 Pa to 1.2x10 Pa, leak rate of 1.3x10 Pa L/s.
Manually operated angle valves are an excellent solution when automation is not required, they are frequently used in 
roughing and high-vacuum forelines and make excellent chamber venting valves. QiMing Angle valves are used in applications ranging from semiconductor manufacturing, plasma physics research, to nuclear accelerators.QiMing offers all series angle valves suited for vacuum applications such as high vacuum process processes, high vacuum applications in pumping systems, semiconductor technology and research systems.

产品简介

角式挡板阀可手动或气动驱动丝杆,带动阀杆升降实现阀座启闭,以此导通、切断真空管路气流。阀体提供 90° 直角 L 型、45°Y 型两种结构;连接端口支持 KF、ISO、CF 标准真空法兰与管道焊接端头,适配各类高真空系统。 该阀门专为高真空工况设计,适配压强区间 1×10⁻¹Pa~1.2×10⁻¹Pa,密封漏率低至 1.3×10⁻¹Pa・L/s。手动款无需自动化配套,广泛用于粗抽管路、高真空前级管路,也可作为真空腔体泄压阀。 本系列角阀适配多行业高端真空设备,覆盖半导体制造、等离子物理实验、核加速器等场景。

核心优势

  1. 双结构阀体可选:90°L 型、45°Y 型,适配不同设备安装布局,节省设备空间;
  2. 多规格标准接口:KF 快装、ISO、CF 超高真空法兰、焊接管端全覆盖,通用性强;
  3. 超低泄漏密封性能,稳定维持高真空环境,低放气满足洁净真空需求;
  4. 提供手动、气动两种驱动形式,无自动化需求可选手动款,降低设备成本;
  5. 应用场景广泛,科研、半导体、新能源、核物理实验设备均可配套。

适用行业

半导体生产设备、等离子物理实验室、核加速器装置、真空镀膜设备、锂电真空腔体、科研真空测试平台

真空角式挡板阀

 

 

 

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